Lin, Wei-Cheng, and Te-Hsun Liu. “The Design of High-End Pressure Control Valve (PCV) Control System With DeviceNet Interface in Semiconductor Wafer Foundry”. Asian Journal of Applied Sciences 4, no. 2 (April 16, 2016). Accessed April 26, 2024. https://www.ajouronline.com/index.php/AJAS/article/view/3787.