Fabrication of Nanoporous Alumina Films and Optimization of Anodizing Process Parameters
Keywords:nanoporous alumina, anodizing, atomic force microscopy, scanning tunnel microscopy
the electrolyte temperature and anodizing voltage effect on the pore structure and their penetration depth of pores in nanoporous alumina (NPA) films were investigated. The pore sizes, the distance between them and the film thickness were changed by varying anodizing voltage and electrolyte temperature. It was found that NPÐ films have more ordered pores if fabricated at low electrolyte temperature (4 Â°C). For better control over the pore propagation, anodizing voltage was reduced after getting desired thickness of alumina film. For this technique, optimum parameters of anodizing process (0.4 M oxalic acid (COOH)2, voltage U=30-100 V, electrolyte temperature T=4-8 Â°C) were determined. Proposed method reduces the pore opening time while maintaining the mechanical integrity of the film.
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